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Beilstein J. Nanotechnol. 2017, 8, 863–871, doi:10.3762/bjnano.8.88
Figure 1: (a) Cross section schematic of the nanoporous organosilicate glass (OSG) fin structures investigate...
Figure 2: (a) Transmission FTIR and AFM-IR spectra of the symmetric SiC–H3 deformation mode from a nanoporous...
Figure 3: SiC–H3 absorbance (AFM-IR) and Young’s modulus (CR-AFM) as functions of the feature size for unpatt...
Figure 4: (a) and (b) AFM-IR spectra of the symmetric SiC–H3 deformation mode from the patterned nanoporous o...